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Industry Case Semiconductor Fab Oht Management System and Digital Twin for Oht Operation

본 연구에서는 1,000대 이상의 OHT(Overhead Hoist Transport)를 효과적으로 제어하고 관리할 수 있는 강화 학습 기반의 OHT 관리 시스템(OMS, OHT Management System)의 프레임워크 및 OMS의 테스트 및 검증을 위한 디지털 트윈 솔루션인 OMS-DT를 소개한다. OMS-DT는 차량 에뮬레이터, OMS 커넥터, 가상 공장으로 구성되며, 해당 가상 시스템을 주요 반도체 팹 건설업체들이 어떻게 활용하고, 궁극적으로 OHT 배치 프로세스를 개선하는 데 기여했는지를 설명한다.

The overhead hoist transport (OHT) system, which is the primary automated material handling system (AMHS) in semiconductor fab. We present the framework of the OHT management system (OMS) which effectively controls and manages more than 1,000 OHT vehicles with reinforcement learning algorithm. In this presentation, we focus on the commercialization of the OMS based on novel algorithms and explain its basic architecture. We also present the Digital Twin Solution of the OMS for testing and verification. The OMS Digital Twin (OMS-DT) consists of a vehicle emulator, OMS connectors, and a virtual factory. We demonstrate how this virtual system has been used by major semiconductor fab manufacturers and has ultimately improved OHT deployment processes.

* URL: https://informs-sim.org/wsc22papers/337.pdf